Guia docent Escola Tècnica Superior d'Enginyeria Química |
català |
Nanociència i Nanotecnologia (2006) |
Assignatures |
NANOFABRICACIÓ I NANOPROCESSAT |
Continguts |
DADES IDENTIFICATIVES | 2010_11 |
Assignatura | NANOFABRICACIÓ I NANOPROCESSAT | Codi | 205151106 | |||||
Ensenyament |
|
Cicle | 2n | |||||
Descriptors | Crèd. | Tipus | Curs | Període | ||||
5 | Obligatòria | Segon | Únic anual |
Competències | Objectius d'aprenentatge | Continguts |
Planificació | Metodologies | Atenció personalitzada |
Avaluació | Fonts d'informació | Recomanacions |
Tema | Subtema |
Chapter 0. | Introduction and preliminary concepts. |
Chapter 1. Visible and ultraviolet lithography. | Concept of optical lithography. Conventional optical lithography. Resists. Equipment. Microelectronics as driving force for miniaturization. Limits of optical lithography. Advanced optical lithography. |
Chapter 2. Electron-beam lithography. |
Introduction to Electron Beam Lithography. Electron Optics: EBL Systems. Electron-Solid Interactions. Exposure: Resists. Proximity effects. Process Technology. Applications. |
Chapter 3. Nanofabrication with polymers. | Polymer availability for top-down lithography. Bottom-up lithography with polymers. Block-copolymers. Fabrication of polymer nanostructures. |
Chapter 4. Focused ion-beam technology. |
Polymer availability for top-down lithography. Bottom-up lithography with polymers. Block-copolymers. Fabrication of polymer nanostructures. |
Chapter 5. Non-conventional lithographic techniques. | Lithographies based on near field microscopies: Introduction to Scanning Probe Microscopy. Summary of Scanning Probe Lithography Methods. Atomic manipulation (STM). Manipulation of objects and molecules. Indentation/Local deposition. Local oxidation nanolithography. Local dispensing of liquids and molecules (including Dip Pen nanolithography). Parallel nanofabrication. Interference or holographic lithography. Embossing lithographies: Hot embossing and nanoimprinting. Soft lithographies. |
Chapter 6. Non-lithographic nanofabrication methods. | Fabrication of nanotemplates. Growth inside the templates. Self-assembling of molecules and crystals. Synthesis of nanotubes, nanowires, nanobelts and nanoparticles. |
Chapter 7. Growth and deposition techniques. |
Process of growth. Evaporation. Molecular beam epitaxy. Sputtering. Ion-assited deposition. Laser ablation. Chemical phase deposition. Plasma-assisted deposition. Langmuir-Blodgett deposition method. |
Chapter 8. Processing of layers. | Wet and dry chemical etching. Lift-off processes. Plasma assisted and reactive etching. Ionic etching. |
Chapter 9. | Examples. |