| Basic |
M.J. Madou, Fundamentals of microfabrication : the science of miniaturization. 2nd edition., CRC Press, 2002
B. Bushan et al., Springer Handbook of Nanotechnology, Springer, 2006
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications. 2nd Edition., William Andrew Publishing/Noyes, 2001
H.S. Nalwa (editor), Encyclopedia of nanoscience and nanotechnology, American Scientific Publishers, 2004
Z. Cui, Micro-Nanofabrication: Technology and Applications, Springer Verlag, 2006
M. Ohring, Materials Science of Thin Films, Academic Press, 2002
J.A. Venables, Introduction to Surface and Thin Film Processes, Cambridge University Press, 2001
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| Complementary |
, Journals in the field of Nanotechnology, ,
, Applied Physics and Chemical Synthesis, ,
, Proceedings of conferences in the field of the course, ,
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