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Reunions amb els alumnes bé individualment o en petits grups per tal de resoldre dubtes, indicar punts de millora i orientar en el desenvolupament general de l'assignatura.
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Other comments and second exam session |
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| Bàsica |
M.J. Madou, Fundamentals of microfabrication : the science of miniaturizatio, last edition, CRC Press
B. Bushan et al, Springer Handbook of Nanotechnology, last edition, Springer,
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications, last edition, William Andrew Publishing/Noyes
Z. Cui, Micro-Nanofabrication: Technology and Applications, last edition, Springer Verlag
M. Ohring, Materials Science of Thin Films, last edition, Academic Press
J.A. Venables, Introduction to Surface and Thin Film Processes, last edition, Cambridge University Press
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| Complementària |
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(*)The teaching guide is the document in which the URV publishes the information about all its courses. It is a public document and cannot be modified. Only in exceptional cases can it be revised by the competent agent or duly revised so that it is in line with current legislation. |
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