| Competences |
| Type A | Code | Competences Specific |
| Research | ||
| AR9 | Recognizing how specific physical properties can arise from the structure of the molecular materials and from the intermolecular interactions that are established in their structure. | |
| AR10 | Understanding and managing the concept of “clean room training” and the associated processes. | |
| AR11 | Practical knowledge of the photolithography, etching, deposition, growth at high temperatures and nanolithography processes. | |
| AR12 | Monitoring and characterizing processes. | |
| Type B | Code | Competences Transversal |
| Research | ||
| BR2 | Treballar de manera autònoma amb iniciativa. | |
| BR4 | Capacitat d’organització i planificació. | |
| BR7 | Treball en equip | |
| Type C | Code | Competences Nuclear |
| Common | ||
| CC6 | Acquiring basic IT skills | |
| CC7 | Communicating with experts from other professional fields | |
| Learning aims |
| Objectives | Competences | ||
| Recognizing how specific physical properties can arise from the structure of the molecular materials and from the intermolecular interactions that are established in their structure. | AR9 |
BR2 BR4 BR7 |
CC6 CC7 |
| Understanding and managing the concept of “clean room training” and the associated processes. | AR10 |
BR2 BR4 BR7 |
CC6 CC7 |
| Practical knowledge of the photolithography, etching, deposition, growth at high temperatures and nanolithography processes. | AR11 |
BR2 BR4 BR7 |
CC6 CC7 |
| Monitoring and characterizing processes. | AR12 |
BR2 BR4 BR7 |
CC6 CC7 |
| Contents |
| Topic | Sub-topic |
| Contents | 1.- Introduction to Clean Room Processing 2.- Processes for fabrication of nanostructures 3.- Mask design (practical work) 4.- Processing of nanostructures (practical work) 5.- Characterization |
| Planning |
| Methodologies :: Tests | |||||||||
| Competences | (*) Class hours | Hours outside the classroom | (**) Total hours | ||||||
| Introductory activities |
|
1 | 0 | 1 | |||||
| Lecture |
|
2 | 4 | 6 | |||||
| Assignments |
|
9 | 36 | 45 | |||||
| Personal tuition |
|
8 | 0 | 8 | |||||
| Practical tests |
|
2 | 0 | 2 | |||||
| (*) On e-learning, hours of virtual attendance of the teacher. (**) The information in the planning table is for guidance only and does not take into account the heterogeneity of the students. | |||||||||
| Methodologies |
| Description | |
| Introductory activities | Three introductory sessions to work with the fundamental concepts in this field. |
| Lecture | The lecturer will present the contents of the course. He will often ask questions to the students so that they take an activerole in class. |
| Assignments | After each session, students will have to deliver a report: 1.- After sessions 2), the students must work on the design of the structure and the fabrication process. They will have to use the bibliographical references recommended. 2.- After sessions 5) the students must write a report on the design. 3.- After sessions 8)) the students must submit a report on the ‘micro’ fabrication 4.- At the end of the course, the students must submit an overall report. |
| Personalized attention |
|
|
| Assessment |
| Description | Weight | ||
| Assignments | After each session, students will have to deliver a report: 1.- After sessions 2), the students must work on the design of the structure and the fabrication process. They will have to use the bibliographical references recommended. 2.- After sessions 5) the students must write a report on the design. 3.- After sessions 8)) the students must submit a report on the ‘micro’ fabrication 4.- At the end of the course, the students must submit an overall report. |
70 | |
| Practical tests | This subject has a clear practical character. There will be a test of its kind to demonstrate the acquired knowledge and skills. | 30 | |
| Other comments and second exam session | |||
| Sources of information |
| Basic |
M.J. Madou, Fundamentals of microfabrication : the science of miniaturizatio, last edition, CRC Press
B. Bushan et al, Springer Handbook of Nanotechnology, last edition, Springer,
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications, last edition, William Andrew Publishing/Noyes
Z. Cui, Micro-Nanofabrication: Technology and Applications, last edition, Springer Verlag
M. Ohring, Materials Science of Thin Films, last edition, Academic Press
J.A. Venables, Introduction to Surface and Thin Film Processes, last edition, Cambridge University Press |
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| Complementary | |||||||||
| Recommendations |
| Other comments | |
| It is necessary to have taken during the first term the Nanofabrication and Nanoprocessing course. |
(*)The teaching guide is the document in which the URV publishes the information about all its courses. It is a public document and cannot be modified. Only in exceptional cases can it be revised by the competent agent or duly revised so that it is in line with current legislation.