| Competences |
| Type A | Code | Competences Specific |
| A1.2 | A1.2. Carrying out exhaustive bibliographic searches in highly specialized areas of nanoscience, materials and product and process design. | |
| A1.4 | A1.4. Conceiving, designing, constructing, reformulating and maintaining equipment, applications and efficient designs for experimental and numerical simulation studies in chemical technology. | |
| A1.6 | A1.6. Analyse, identify and evaluate the data obtained from experiments and databases in the field of nanoscience, materials and chemical technology. | |
| A2.1 | A2.1. Presenting results in line with the format of experimental scientific literature and in accordance with the commonly accepted standards. | |
| Type B | Code | Competences Transversal |
| B3.1 | B3.1. Collaborative teamwork, with responsibility shared among multidisciplinary, multilingual and multicultural teams. | |
| B5.1 | B5.1. Working autonomously whilst remaining responsible and using initiative, in a research and innovative context. | |
| Type C | Code | Competences Nuclear |
| C1.1 | Have an intermediate mastery of a foreign language, preferably English | |
| C1.2 | Be advanced users of the information and communication technologies | |
| C1.3 | Be able to manage information and knowledge |
| Learning outcomes |
| Type A | Code | Learning outcomes |
| A1.2 |
A1.2 Understand the principles of constructing, operating and maintaining a clean room. | |
| A1.4 |
A1.4 Can design micro- and nanostructured chips. | |
| A1.6 |
A1.6 Take part in the practices and procedures required for working in a clean room. | |
| A2.1 |
A2.1 Can use characterisation techniques (SEM, Raman microscopy, etc.) to evaluate the micro- and nanostructures constructed. A2.1 Can use techniques for constructing nanostructures and optimise parameters, scope and limitations. | |
| Type B | Code | Learning outcomes |
| B3.1 |
B3.1 Accept and comply with the rules of the group. B3.1 Take active part in planning the team’s work, distributing tasks and respecting deadlines. B3.1 Contribute to the positive management of any differences, disagreements and conflicts that arise in the team. B3.1 Make their personal contribution in the time expected and with the resources available. B3.1 Take active part and share information, knowledge and experiences. B3.1 Take into account the points of view of others and give constructive feedback. | |
| B5.1 |
B5.1 Analyse their own limitations and potential for undertaking a particular task. B5.1 Decide how to manage and organize the work and time required to carry out a task from the basis of a general plan. B5.1 Decide how to manage and organize the work and time. B5.1 Reflect on their learning process and learning needs. | |
| Type C | Code | Learning outcomes |
| C1.1 |
Express opinions on abstract or cultural topics in a limited fashion. Explain and justify briefly their opinions and projects. Understand instructions about classes or tasks assigned by the teaching staff. Understand routine information and articles. Understand the general meaning of texts that have non-routine information in a familiar subject area. Write letters or take notes about foreseeable, familiar matters. | |
| C1.2 |
Understand basic computer hardware. Understand the operating system as a hardware manager and the software as a working tool. Use software for off-line communication: word processors, spreadsheets and digital presentations. Use software for on-line communication: interactive tools (web, moodle, blogs, etc.), e-mail, forums, chat rooms, video conferences, collaborative work tools, etc. | |
| C1.3 |
Locate and access information effectively and efficiently. Critically evaluate information and its sources, and add it to their own knowledge base and system of values. Have a full understanding of the economic, legal, social and ethical implications of accessing and using information. Reflect on, review and evaluate the information management process. |
| Contents |
| Topic | Sub-topic |
| Continguts teòrics: |
1. Clean room basics a. Clean room concept. Description and types. b. Clean room operation. c. Work procedures, activities and risks. 2. Clean room fabrication processes a. Component design: practical fundamentals and tools b. Clean room techniques introduction: operation principles, scopes and limitations. |
| Practice: |
1. Chip design with micro and nano structures. 2. Designed chip fabrication using nanolithography techniques. 3. Experimental characterization and assessment using microscopy (Raman, SEM). 4. Clean room facility visit (Instituto de Microelectrónica de Barcelona, CNM-IMB). |
| Planning |
| Methodologies :: Tests | ||||||||||
| Competences | (*) Class hours |
Hours outside the classroom |
(**) Total hours | |||||||
| Introductory activities |
|
2 | 2 | 4 | ||||||
| Lecture |
|
10 | 4 | 14 | ||||||
| Laboratory practicals |
|
20 | 5 | 25 | ||||||
| Seminars |
|
5 | 15 | 20 | ||||||
| Personal attention |
|
5 | 5 | 10 | ||||||
| Extended-answer tests |
|
1 | 2 | 3 | ||||||
| (*) On e-learning, hours of virtual attendance of the teacher. (**) The information in the planning table is for guidance only and does not take into account the heterogeneity of the students. | ||||||||||
| Methodologies |
| Description | |
| Introductory activities | Contents and dynamics of the topic are depicted to the students. The objectives and intended skills of the topic are explained. The URV clean room facilities are visited. Students work groups are created. |
| Lecture | The theory and practice concepts of the topics are provided: - Clean rooms: brief history and evolution. - Current technologies. - Norms and procedures. - Technological and design features. - Practical features. - Future trends. At the master classes current technologies are examined, their scope and limitations. |
| Laboratory practicals | The students perform practical activities for the micro and nano structures. These tasks are: 1) Design tool learning. 2) Use the design tool to plan a chip. 3) Chip fabrication at the clean room. 4) Chip characterization by microscopy. 5) Result assessment. |
| Seminars | Students alone or in groups, present several aspects related with the contents and practical work of the topic. 1) Design and operation of the clean room 2) Laboratory results presentation 3) Complete work and clean room visit presentation. |
| Personal attention | Students are involved in single and group tutorial sessions to go in depth in several concepts and solve theory or practice doubts. |
| Personalized attention |
| Description |
| Francisco Javier Andrade Despatx 312 - int: 8491 Franciscojavier.andrade@urv.cat |
| Assessment |
| Methodologies | Competences | Description | Weight | ||||||
| Seminars |
|
Group seminars are assessed taking into account the group presentation overall quality and the individual student contribution. Quality of experimental results and student and group commitment, are also assessed. |
65 | ||||||
| Extended-answer tests |
|
Written exams in class | 35 | ||||||
| Others |
| Other comments and second exam session | |||
| Sources of information |
| Basic |
W. White, Cleanroom technology-Fundamentals of design, testing and operation,, last edition, Wiley
W. White, Cleanroom design,, last edition , Wiley
D. Conway, Practical Cleanrooms: technologies and facilities,, last edition , Elsevier |
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| Complementary | |||||||||
| Recommendations |
(*)The teaching guide is the document in which the URV publishes the information about all its courses. It is a public document and cannot be modified. Only in exceptional cases can it be revised by the competent agent or duly revised so that it is in line with current legislation.