| Competences |
| Type A | Code | Competences Specific |
| A1.2 | A1.2. Carrying out exhaustive bibliographic searches in highly specialized areas of nanoscience, materials and product and process design. | |
| A1.4 | A1.4. Conceiving, designing, constructing, reformulating and maintaining equipment, applications and efficient designs for experimental and numerical simulation studies in chemical technology. | |
| A1.6 | A1.6. Analyse, identify and evaluate the data obtained from experiments and databases in the field of nanoscience, materials and chemical technology. | |
| A2.1 | A2.1. Presenting results in line with the format of experimental scientific literature and in accordance with the commonly accepted standards. | |
| Type B | Code | Competences Transversal |
| B3.1 | Work in multidisciplinary teams and in complex contexts. | |
| B3.2 | Resolve conflicts constructively. | |
| B5.1 | Develop sufficient autonomy to work in scientific, technological or cultural research projects and collaborations in the discipline | |
| B5.3 | Apply new technologies and advances with initiative and entrpreneurial spirit and manage and use information in an eficient manner. | |
| Type C | Code | Competences Nuclear |
| Learning outcomes |
| Type A | Code | Learning outcomes |
| A1.2 |
A1.2 Understand the principles of constructing, operating and maintaining a clean room. | |
| A1.4 |
A1.4 Can design micro- and nanostructured chips. | |
| A1.6 |
A1.6 Take part in the practices and procedures required for working in a clean room. | |
| A2.1 |
A2.1 Can use characterisation techniques (SEM, Raman microscopy, etc.) to evaluate the micro- and nanostructures constructed. A2.1 Can use techniques for constructing nanostructures and optimise parameters, scope and limitations. | |
| Type B | Code | Learning outcomes |
| B3.1 |
B3.1 Take active part and share information, knowledge and experiences. B3.1 Make their personal contribution in the time expected and with the resources available. B3.1 Accept and comply with the rules of the group. B3.1 Take active part in planning the team’s work, distributing tasks and respecting deadlines. | |
| B3.2 |
Take into account the points of view of others and give constructive feedback. Contribute to the positive management of any differences, disagreements and conflicts that arise in the team. | |
| B5.1 |
B5.1 Decide how to manage and organize the work and time required to carry out a task from the basis of a general plan. B5.1 Analyse their own limitations and potential for undertaking a particular task. B5.1 Decide how to manage and organize the work and time. B5.1 Reflect on their learning process and learning needs. | |
| B5.3 |
Understand basic computer hardware. Understand the operating systems as a hardware manager and the software as a working tool. | |
| Type C | Code | Learning outcomes |
| Contents |
| Topic | Sub-topic |
| Continguts teòrics: |
1. Clean room basics a. Clean room concept. Description and types. b. Clean room operation. c. Work procedures, activities and risks. 2. Clean room fabrication processes a. Component design: practical fundamentals and tools b. Clean room techniques introduction: operation principles, scopes and limitations. |
| Practice: |
1. Chip design with micro and nano structures. 2. Designed chip fabrication using nanolithography techniques. 3. Experimental characterization and assessment using microscopy (Raman, SEM). 4. Clean room facility visit (Instituto de Microelectrónica de Barcelona, CNM-IMB). |
| Planning |
| Methodologies :: Tests | ||||||||||
| Competences | (*) Class hours |
Hours outside the classroom |
(**) Total hours | |||||||
| Introductory activities |
|
2 | 2 | 4 | ||||||
| Lecture |
|
10 | 4 | 14 | ||||||
| Laboratory practicals |
|
20 | 5 | 25 | ||||||
| Seminars |
|
5 | 15 | 20 | ||||||
| Personal attention |
|
5 | 5 | 10 | ||||||
| Extended-answer tests |
|
1 | 2 | 3 | ||||||
| (*) On e-learning, hours of virtual attendance of the teacher. (**) The information in the planning table is for guidance only and does not take into account the heterogeneity of the students. | ||||||||||
| Methodologies |
| Description | |
| Introductory activities | Contents and dynamics of the topic are depicted to the students. The objectives and intended skills of the topic are explained. The URV clean room facilities are visited. Students work groups are created. |
| Lecture | The theory and practice concepts of the topics are provided: - Clean rooms: brief history and evolution. - Current technologies. - Norms and procedures. - Technological and design features. - Practical features. - Future trends. At the master classes current technologies are examined, their scope and limitations. |
| Laboratory practicals | The students perform practical activities for the micro and nano structures. These tasks are: 1) Design tool learning. 2) Use the design tool to plan a chip. 3) Chip fabrication at the clean room. 4) Chip characterization by microscopy. 5) Result assessment. |
| Seminars | Students alone or in groups, present several aspects related with the contents and practical work of the topic. 1) Design and operation of the clean room 2) Laboratory results presentation 3) Complete work and clean room visit presentation. |
| Personal attention | Students are involved in single and group tutorial sessions to go in depth in several concepts and solve theory or practice doubts. |
| Personalized attention |
| Description |
| Francisco Javier Andrade Despatx 312 - int: 8491 Franciscojavier.andrade@urv.cat |
| Assessment |
| Methodologies | Competences | Description | Weight | |||||
| Seminars |
|
Group seminars are assessed taking into account the group presentation overall quality and the individual student contribution. Quality of experimental results and student and group commitment, are also assessed. |
65 | |||||
| Extended-answer tests |
|
Written exams in class | 35 | |||||
| Others |
| Other comments and second exam session | |||
| Sources of information |
| Basic |
W. White, Cleanroom technology-Fundamentals of design, testing and operation,, last edition, Wiley
W. White, Cleanroom design,, last edition , Wiley
D. Conway, Practical Cleanrooms: technologies and facilities,, last edition , Elsevier |
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| Complementary | |||||||||
| Recommendations |
| Subjects that are recommended to be taken simultaneously | ||
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(*)The teaching guide is the document in which the URV publishes the information about all its courses. It is a public document and cannot be modified. Only in exceptional cases can it be revised by the competent agent or duly revised so that it is in line with current legislation.