Bàsica W. Menz, J. Mohr, O. Paul, Microsystem Technology, Wiley-VCH, 2001
Hsu, Tai-Ran, MEMS and Microsystems, McGraw-Hill, 2002

Complementària H.J. Levinson, Principles of Lithography, SPIE press, 2005
M. Köhler, Etching in Microsystem Technology, Wiley-VCH, 1999