| Educational guide Escola Tècnica Superior d`Enginyeria |
english |
| Enginyeria Electrònica (2006) |
 Subjects |
| TECNOLOGIA DE MICROSISTEMES |
| Sources of information |
| IDENTIFYING DATA | 2008_09 |
| Subject | TECNOLOGIA DE MICROSISTEMES | Code | 175101207 | |||||
| Study programme |
|
Cycle | 2nd | |||||
| Descriptors | Credits | Type | Year | Period | ||||
| 4 | Optional | Only annual |
||||||
| Competences | Learning aims | Contents |
| Planning | Methodologies | Personalized attention |
| Assessment | Sources of information | Recommendations |
| Basic |
W. Menz, J. Mohr, O. Paul, Microsystem Technology, Wiley-VCH, 2001
Hsu, Tai-Ran, MEMS and Microsystems, McGraw-Hill, 2002 |
| Complementary |
H.J. Levinson, Principles of Lithography, SPIE press, 2005
M. Köhler, Etching in Microsystem Technology, Wiley-VCH, 1999 |
