Educational guide School of Chemical Engineering |
english |
Nanoscience, Materials and Processes: Chemical Technology at the Frontier |
Subjects |
NANOFABRICATION AND NANOPROCESSING |
Sources of information |
IDENTIFYING DATA | 2023_24 |
Subject | NANOFABRICATION AND NANOPROCESSING | Code | 20705206 | |||||
Study programme |
|
Cycle | 2nd | |||||
Descriptors | Credits | Type | Year | Period | ||||
4.5 | Optional | First | AN |
Competences | Learning outcomes | Contents |
Planning | Methodologies | Personalized attention |
Assessment | Sources of information | Recommendations |
Basic |
M.J. Madou , Fundamentals of microfabrication: the science of miniaturization. , CRC Press , 2002 B. Bushan et al. , Springer Handbook of Nanotechnology , Springer, 2006 J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications. , William Andrew Publishing/Noyes , 2001 H.S. Nalwa (editor) , Encyclopedia of nanoscience and nanotechnology , American Scientific Publishers , 2004 Z. Cui , Micro-Nanofabrication: Technology and Applications , Springer Verlag , 2006 M. Ohring , Materials Science of Thin Films , Academic Press , 2002 J.A. Venables , Introduction to Surface and Thin Film Processes , Cambridge University Press , 2001 |
Complementary | |
Journals in the field of Nanotechnology Applied Physics and Chemical Synthesis Proceedings of conferences in the field of the subject |