| Basic |
M.J. Madou, Fundamentals of microfabrication : the science of miniaturizatio, last edition, CRC Press
B. Bushan et al, Springer Handbook of Nanotechnology, last edition, Springer,
J.N. Helbert, Handbook of VLSI Microlithography - Principles, Tools, Technology and Applications, last edition, William Andrew Publishing/Noyes
Z. Cui, Micro-Nanofabrication: Technology and Applications, last edition, Springer Verlag
M. Ohring, Materials Science of Thin Films, last edition, Academic Press
J.A. Venables, Introduction to Surface and Thin Film Processes, last edition, Cambridge University Press
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